Tegal Announces Continuing Discussions for Balance of Nanolayer Deposition Patent Portfolio

By Matthew Kennedy
Benzinga Staff Writer
February 14, 2012 8:02 AM

Symbols: TGAL

Posted in: News, Events

Tegal Corporation (NASDAQ: TGAL) today announced renewed efforts to make available the balance of its semiconductor process-related intellectual property portfolio. The remaining portfolio consists of thin film structures and process technology pertaining to copper barrier and low-k dielectric technology.

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Tegal Announces Continuing Discussions for Balance of Nanolayer Deposition Patent Portfolio

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