Canon U.S.A., Inc., a leader in digital imaging solutions, recently launched
sales of the new FPA-3030i5+ i-line stepper. The FPA-3030i5+ is designed to
provide a long-term manufacturing solution for manufacturers of
energy-efficient, environmentally conscious devices^*1 including
Light-Emitting Diodes (LEDs),MicroElectroMechanical Systems (MEMS)^*2 and
power semiconductors^*3.
As awareness of clean energy and energy conservation continues to increase,
demand has simultaneously increased for new environmentally conscious
technologies including wind and solar power, high-efficiency vehicles and
low-power facilities. As a result, manufacturers of these devices have unique
process requirements that have been incorporated into the FPA-3030i5+
semiconductor stepper design that, along with optional equipment available to
be purchased separately, will help facilitate these process requirements.
The FPA-3030i5+ represents a new product platform, designed specifically to
provide a flexible solution for a variety of users, including power
semiconductor, LED and MEMS manufacturers.
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