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Nova Measuring Instruments Ltd.
NVMI, a leading provider of optical
metrology solutions to the semiconductor process control market, reported
today that two major customers ordered its recently launched TSV
(Through-Silicon Via) metrology system, the Nova V2600^[^TM^].
These orders follow a thorough technical evaluation process by customer
experts selecting the Nova V2600 for its unique ability to provide complete
three-dimensional metrology of the TSV for several technology nodes. Profile
information, available for the first time through the use of Nova's patent
pending Dark-Field Reflectometry, is considered critical for properly
controlling the etching and insulation steps of TSV formation. The
high-throughput Nova V2600 was selected to support the transition to volume
production of 3D integration with minimal yield loss to TSV electrical
failures.
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