Axcelis Announces Multiple Orders For 'Purion M' Implanter From Several Specialty Device Manufacturers

Axcelis Technologies, Inc.

, a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today that it has received orders for the Company's Purion M™ medium current implanter from three leading specialty device chipmakers. The systems, ranging in wafer sizes from 150-300mm, will be used in high volume production of image sensors, power devices and specialty logic chips supporting automotive, mobile and the Internet of Things market spaces. The first system has shipped, with revenue expected in the fourth quarter. The other tools will ship in the second half of 2016, upon completion of a R&D program funded by two customers. "These wins highlight the advantages the Purion M provides for specialty device manufacturing, especially in the areas of energetic metals contamination control and advanced process control," said Bill Bintz, executive vice president, engineering and marketing. "The Purion M's innovative hybrid filtering technique is the only technology available today specifically designed to utilize both magnetic and electrostatic filtration to enable unmatched metals filtration, subsequently delivering significantly higher device yield for our customers." He continued, "New investments in R&D for advanced process control technologies, specifically designed to address emerging device types and substrates, will enable fabrication of these structures at the highest levels of productivity and yield." John Aldeborgh, executive vice president, customer operations, commented, "We're excited about the adoption of the Purion M in the very active specialty device market. Our customers in this space have seen a strong resurgence in business, and they are actively upgrading for technology and productivity reasons. This market has accounted for nearly half of our sales in 2015, and we look forward to expanding our footprint with the full Purion Platform, including the Purion M, Purion H, and Purion XE." President and CEO Mary Puma said, "We reiterate Q3 guidance and remain confident that Axcelis will exit 2015 with 17-20% market share of the implant market. We also expect continued market share growth in 2016 as the Purion product family enters volume production at additional memory and non-leading edge logic and foundry fabs."